Kofloc Pressure Regulator Valve (Precision Regulator for Low Pressure Regulation) MODEL 6610

Pressure Regulator  Valve (Precision Regulator  for Low Pressure Regulation)
MODEL 6610

This valve has been developed for
better repeatability and quick, reliable pressure regulation by increasing the
ac
curacy of the low-pressure side
compared with the Model 6600. It is ideal for high-sensitivity analyzers and
semiconductor manufacturing equipment, as well as for research and development.


1.Features
-High-precision regulation on the
low-pressure side
High regulation performance with
repeatability of ±1% or less when
the pressure on the primary side and
load resistance on the second-
ary side change under the set
pressure condition of 0.01–0.15 MPa.
– Non-grease specification
The sections in contact with gas are
made of stainless steel, Viton,
and Teflon without using grease. This
valve is ideal for the semicon-
ductor industry which requires
ultra-clean conditions.
– Lock nut
The regulating position, once it has
been set, can be fixed by a lock
nut to prevent the setting from
changing.
– Non-bleed type
This non-bleed type valve prevents
gas from leaking to the outside
2.Application
-Gas chromatography
– High-purity gas control
– Low-pressure controllers
– Semiconductor industry
3.Standard Specifications
Fluids
Various gases
Maximum primary pressure
0.4MPa
Secondary control pressure
0.01-0.15MPa
Maximum flow
5L/MIN
Minimum operating differential
0.1 MPa or more
Materials of parts in contact with
gases
SUS316, FKM, fluorocarbon resin,
SUS304,
SUS303
Proof pressure
0.8MPa
Repeatability
Within ±1% of the pressure rating
Heat resistance
5°C-60°C
Connection end
Rc1/8
Materials of parts in contact with
fluids
SUS316, FKM, fluorocarbon resin,
SUS304,
SUS303