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Kofloc Low-Cost Metal Sealed Mass Flow Controller /Meter Model 5400
Kofloc Low-Cost Metal Sealed Mass Flow Controller /Meter Model 5400

Kofloc Low-Cost Metal Sealed Mass Flow Controller /Meter Model 5400

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The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to conventional MFC. The sensor drive system is improved: the zero-drift is further reduced and the response in the lower range is improved.

The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 series.Kofloc Mass Flow Controller Model 5400

Features :

  • Control and response in each setting range are improved.
    • The following capability to the set voltage is improved (supporting ramping specifications).
    • As the valve is improved, the control resolution in each range is improved.

Standard Specifications 

  1. Flow range (N2 equivalent,20℃/1 atm) 
  • 5400: 10 SCCM–20 SLM (freely selectable)
  • 5410: 10 SCCM–20SLM(freely selectable)
  1. Sensor
  • 5400: Thermal mass flow sensor
  1. Valve type 
  • 5400: Proportional solenoid valve (closed when not energized)    5410 :  –
  1. Control range 
  • 5400: 2–100% (F.S.)                                                              5410 :  –
  1. Response 
  • 5400: 1 sec. or less (0–100% within ±2% typical)                              5410 :  –
  1. Accuracy 
  • 5400: ±1% F.S. (20℃)
  1. Repeatability:Within ±0.2% F.S. (20℃)
  2. Operating differential pressure 
  • 5400: F.S. ≤ 5 SLM: 50–300 kPa                                              
  • 5410: F.S.> 5 SLM: 100–300 kPa                                             –
  1. Allowable operating pressure
  • 5400: 300 kPa (G) or less
  1. Proof pressure:980 kPa (G)
  2. Leak rate:1 × 10-11 Pa•m3/s or less
  3. Allowable ambient temperature:  0–50℃(Accuracy guaranteed at 15–35℃,  ±0.1% F.S./℃)
  4. Allowable ambient humidity:10–90% (No condensation allowed)
  5. Materials of parts incontact with gases :  
  • Body: SUS316L
  • Diaphragm: Ni-Co
  • Valve seat: PTFE
  • Sealing: SUS316L, Ni
  1. Electric connection:
  • Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
  1. Flow rate input signals   :
  • 5400  :  0–5 VDC (Input impedance: 1 MΩ or more)  5410 :  –
  1. Flow rate output signals: 0–5 VDC (Minimum load resistance: 250 kΩ or more)
  2. Required power supply :
  • 5400  :  +15 VDC (±5%) 100 mA,   −15VDC (±5%) 200mA                    
  • 5410 :  +15 VDC (±5%) 100 mA,−15VDC (±5%) 100mA                                               
  1. Joint (Main unit bore) :Standard: 1/4 VCR equivalent Option: 1/4 SWL
  2. Weight 
  • 5400: Approx. 1000 g                                        
  •  5410 :  Approx. 800 g
Info : marketing@wmablog.com

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