Compact Handy Mass Flow Control/Measurement Unit
FLOW COMPO This is a compact handy flow control/measuring unit made by combining a compact DIN72 x72 power indicator [CR-400] and MFC/MFM.
Features :
・ Compact, lightweight integral unit
・ The touch panel type permits easy FS scaling, flow setting, and valve opening/closing.
・ Free selection of joints ranging from one-touch type to Swage-lock.
・ The MFC-equipped type (FCC Series) can be used as MFM by pressing the OPEN switch.
・ Please contact us for the metal seal specifications for corrosive gas.
・ The touch panel type permits easy FS scaling, flow setting, and valve opening/closing.
・ Free selection of joints ranging from one-touch type to Swage-lock.
・ The MFC-equipped type (FCC Series) can be used as MFM by pressing the OPEN switch.
・ Please contact us for the metal seal specifications for corrosive gas.
Standard Spesification :
- Mounting MFC/MFM
- FCC-3000-G1 : 3660 (MFC)
- FCC-3000-G2 : 3200 (MFC)
- FCM-3000-G1: 3760 (MFM)
- FCM-3000-G2: 3100 (MFM)
- Standard flow range (at N2 calibration condition)
- FCC-3000-G1 : 10SCCM-20SLM
- FCC-3000-G2 : 1SCCM-20SLM
- FCM-3000-G1 : 10SCCM-20SLM
- FCM-3000-G2: 1SCCM-20SLM
- Sealing material: FKM (option CR or NBR)
- Response
- FCC-3000-G1: Within 2 sec. (F.S. ±2%)
- FCC-3000-G2: Within 1 sec. (F.S. ±2%)
- FCM-3000-G1: Within 1 sec.
- FCM-3000-G2: Within 2 sec.
- Joint: Various joints are applicable.
Info : marketing@wmablog.com |