Kofloc High-grade Mass Flow Meter MODEL 3100 SERIES

The Model 3100 Series Mass Flow Meter is a new, advanced high-precision flowmeter developed based on the Model 3200 Series. The incorporated innovative capillary type flow sensor reduces pressure loss and ensures high response as well as ensuring stability.

Features :

• Equipped with a temperature follow-up type current difference detection flow sensor to ensure high accuracy and quick response.
• Measurements of minute flow available up to 1 SCCM full scale (SR option).

Standard Specifications:

1. Flow range (at N2 calibration conditions) : 10SCCM-20SLM

2. Response : 1 sec. or less to within ±2% of the full scale of  final value typical for 0-100% response

3. Accuracy : Within ±1.0% F.S./3100

4. Linearity: Within ±0.5% F.S.

5. Repeatability: Within ±0.2% F.S.

6. Proof pressure: 980kPa

7. Leak rate: 1×10-8 Pa.m3/s or less (excluding transmission of He)

8. Working temperature range: 0-50℃ (Accuracy guarantee: 15-35℃)

9. Materials of parts exposed to gases: – Body: SUS 316L, SUS 316, PTFE

– Seals: Viton® (Optional: Neoprene®)

10. Joint : – Standard: 1/4SWL®

– Optional: 1/8SWL® 1/4VCR® RC1/4®, etc.

11. Electrical connections: Dsub 9-pin male connector per KFC standard (SEMI standard)

12. Flow rate output signals: 0-5VDC

13. Required power supply* : +15VDC (±5%) 100mA, –15VDC (±5%) 100mA