MODEL RK1500 SERIES
The Model RK1500 Series Flowmeter is equipped with a bellows seal type needle valve so that it can withstand high vacuum, high pressure, high temperature and toxic gases.
Features :
1.High reliability against leak is ensured because 100% leak test is conducted before shipping, using a helium leak detector.
2.Bellows seal type needle valve perfectly eliminates leak from the valve stem.
3.Superior corrosion resistance is ensured by using SUS 316,FKM, fluorocarbon resin and Pyrex glass only for wetted parts and those which are exposed to other
fluids.
4.Enhanced stability and repeatability are ensured using a flowmeter consisting of a precision-formed try-flat, rib-guided glass tube and ultra-precision ball float in combination with a sophisticated needle valve.
Applications :
1.For vacuum systems
2.For semiconductor manufacturing lines
Standard Spesifications :
1.Fluids
Gases : Air, N2, O2, H2, He, Ar, and CO2 (Calibration by actual gas)
For other gases, consultation is necessary regarding whether conversion conditions or calibration by actual gas is to be used.
* Optional: Scale indicating two types of fluids
Liquids : Standard fluid: Water
For other liquids, consultation is necessary regarding whether conversion conditions or calibration by actual liquid is to be used.
2. Flow range
Gases : 0.5-5 ML/MIN to 3-30 L/MIN (See the Capacity Table below.)
* Optional: 0.5-3 ML/MIN
Liquids : 0.5-5 ML/MIN to 0.1-1 L/MIN (See the Capacity Table below.)
* Optional: 0.5-3 ML/MIN
3.Accuracy
Gases : FS±2% (Measurement point)
* Optional: FS±1% (Measurement point)
Liquids : FS±2% (Measurement point)
4. Proof pressure
Gases : 1.0 MPa for 100 ML/MIN or less
0.7 MPa for 5 L/MIN or less
0.5 MPa for 10 L/MIN or more
Liquids : 1.0 MPa for 5 ML/MIN or less
0.7 MPa for 150 ML/MIN or less
0.5 MPa for 200 ML/MIN or more
5.Available scale : 10:1 * Optional: 20:1
Materials : SS
Body block : SUS316
Tapered tube : Pyrex®, glass
Packing : FKM, fluorocarbon resin
Float : Pyrex, SUS 316, glass
Protective cover : Acrylic resin
Temperature resistance : MAX60℃