Kofloc Low-Cost Metal Sealed Mass Flow Controller /Meter Model 5400

The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to conventional MFC. The sensor drive system is improved: the zero-drift is further reduced and the response in the lower range is improved.

The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 series.

Features :

• Control and response in each setting range are improved.
  • The following capability to the set voltage is improved (supporting ramping specifications).
  • As the valve is improved, the control resolution in each range is improved.

Standard Specifications 

1. Flow range (N2 equivalent,20℃/1 atm) 

• 5400: 10 SCCM–20 SLM (freely selectable)
• 5410: 10 SCCM–20SLM(freely selectable)

2. Sensor

• 5400: Thermal mass flow sensor

3. Valve type 

• 5400: Proportional solenoid valve (closed when not energized)    5410 :  –

4. Control range 

• 5400: 2–100% (F.S.)                                                              5410 :  –

5. Response 

• 5400: 1 sec. or less (0–100% within ±2% typical)                              5410 :  –

6. Accuracy 

• 5400: ±1% F.S. (20℃)

7. Repeatability:Within ±0.2% F.S. (20℃)
8. Operating differential pressure 

• 5400: F.S. ≤ 5 SLM: 50–300 kPa                                              
• 5410: F.S.> 5 SLM: 100–300 kPa                                             –

9. Allowable operating pressure

• 5400: 300 kPa (G) or less

10. Proof pressure:980 kPa (G)
11. Leak rate:1 × 10-11 Pa•m3/s or less
12. Allowable ambient temperature:  0–50℃(Accuracy guaranteed at 15–35℃,  ±0.1% F.S./℃)
13. Allowable ambient humidity:10–90% (No condensation allowed)
14. Materials of parts incontact with gases :  

• Body: SUS316L
• Diaphragm: Ni-Co
• Valve seat: PTFE
• Sealing: SUS316L, Ni

15. Electric connection:

• Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)

16. Flow rate input signals   :

• 5400  :  0–5 VDC (Input impedance: 1 MΩ or more)  5410 :  –

17. Flow rate output signals: 0–5 VDC (Minimum load resistance: 250 kΩ or more)
18. Required power supply :

• 5400  :  +15 VDC (±5%) 100 mA,   −15VDC (±5%) 200mA                    
• 5410 :  +15 VDC (±5%) 100 mA,−15VDC (±5%) 100mA                                               

19. Joint (Main unit bore) :Standard: 1/4 VCR equivalent Option: 1/4 SWL
20. Weight 

• 5400: Approx. 1000 g                                        
•  5410 :  Approx. 800 g