Standard Mass Flow Meter
Kofloc MODEL 3760 SERIES
The Model 3760 Series is a compact, low-cost mass flow meter developed based on the Model 3660 Series. It has been developed as a standard model of various analyzers and vacuum equipment for research and development at universities and research institutes.
Features :
- Improved constant-current temperature difference detection type flow sensor for a quick response
- The compact body permits installation at any location.
Standard Specifications:
1. Flow range (N2 equivalent, 20℃/1atm)
- 3760: 10 SCCM–20 SLM (freely selectable)
- 3765: 30 SLM–100 SLM (freely selectable)
2. Sensor: Thermal mass flow sensor
3. Response
- 3760: 2 sec. or less
- 3765 : 3 sec. or less
4. Accuracy
- 3760: ±1.0%F.S. (25℃)
- 3765: ±1.5%F.S. (25℃)
5. Temperature coefficient
- 3760: ±0.1 F.S./℃ (15–35℃)
- 3765: ±0.2 F.S./℃ (15–35℃)
6. Repeatability: ±0.5%F.S. (20℃)
7. Proof pressure: 980kPa (G)
8. Leak rate: 1 × 10-8 Pa•m3/s or less (excluding permeation of He)
9. Allowable ambient temperature: 5–45℃
10. Allowable ambient humidity: 10–90% (No condensation allowed)
11. Materials of parts in contact with gases : Body: SUS316
Sealing: FKM (option: CR or NBR)
12. Electric connection: Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
13. Flow rate output signals : 0–5 VDC (External load resistance: 250 kΩ or more)
14. Required power supply : +15VDC (±5%) 100mA, −15VDC (±5%)100mA
15. Joint (Main unit bore)
3760 : Standard: 1/4SWL
Option: 1/8SWL 1/4VCR RC1/4, etc.
3765 : Standard: 3/8SWL
Option: 1/2SWL 3/8VCR RC3/8, etc.
16. Weight
- 3760: Approx. 800 g
- 3765: Approx. 1000 g
Note :