Flowmeter With Precision Needle Valve (for Accurate Flow Control)
MODEL RK1200 SERIES
This is a grade high precision float type flowmeter com-bined with a needle valve capable of very accurate flow control. It is ideal for measurement and control of minute flows.
Features
– Capable of controlling ultra-minute flows
– A needle valve incorporated to maximize precision control of flows
– Two types of valve arrangement available:at the top or bottom of the meter at the user’s choice
– Wide variations
Applications
– For integration into your equipment panel
– For gas devices to be used on the semiconductor manufacturing site
– For biotechnology industries
– For vacuum line control
Standard Specifications
– Fluids :
*Gases : Air, N2, O2, H2, He, Ar, and CO2 (Calibration by actual gas) For other gases, consultation is necessary regarding whether conversion conditions or calibration by actual gas is to be used. * Optional: Scale indicating two types of fluids
*Liquids : Standard fluid: Water For other liquids, consultation is necessary regarding whether conversion conditions or calibration by actual liquid is to be used.
– Flow range :
*Gases : 0.5-5 ML/MIN to 3-30 L/MIN (See the Capacity Table below.) Optional: 0.5-3 ML/MIN
*Liquids : 0.5-5 ML/MIN to 0.1-1 L/MIN (See the Capacity Table below.) Optional: 0.5-3 ML/MIN
– Accuracy :
*FS±2% (Measurement point) * Optional: FS±1% (Measurement point)
*FS±2% (Measurement point)
– Proof pressure :
*Gases : 1.0 MPa for 100 ML/MIN or less ; 0.7 MPa for 5 L/MIN or less ; 0.5 MPa for 10 L/MIN or more
*Liquids : 1.0 MPa for 5 ML/MIN or less ; 0.7 MPa for 150 ML/MIN or less ; 0.5 MPa for 200 ML/MIN or more
– Available scale : 10:1 * Optional: 20:1
– Body block and some other components : *SS : SUS316
*BS : Brass
– Tapered tube : *SS & BS : Pyrex®, glass
– Packing : *SS : FKM
*BS : NBR
– Float : * SS & BS : Pyrex, SUS316, glass
– Protective cover : * SS & BS : Acrylic resin
– (Temperature resistance) : * SS & BS : MAX60°
– Connection :*SS & BS : Rc1/4(Standard); Rc1/8(Optional)