This mass flow controller/meter driven by a 24VDC power supply has been developed as a successor of the MODEL 8300. The viewpoint change function of the display unit and the pattern setting function are unique to this model, and noise resistance has been improved dramatically. A sister model with a detachable display and setting unit is also available.
KOFLOC 8500 series mass flow controller or mass flow meter comes with a display and setting unit. Suitable for a wide range of gases. The 8500 series mass flow controller full-scale flow ranges from 10 SCCM to 20 SLPM. The mass flow controller or mass flow meter display can be an integral or remote type. It has an input signal and output signal of 0-5Vdc or 4-20mA. RS232C or RS485 communication is available.
FEATURES
- The high-lift actuator allows this compact model to control a large flow rate.
- Equipped with a display and setting unit, this model can be operated by a 24VDC power supply.
- The RS232C/RS485 communication function and integration function are provided as standard equipment.
- The 14-bit converter permits to display and operation in 4-1/2 digits.
- Control of the flow rate of inflammable gas is possible because the heat-generating part of the sensor is not exposed to the gas.
- There are no limitations to the mounting position that may be employed.
- In addition to the SV setting, five other patterns can be set.
- Auto zero and auto close functions are also standard.
Specification
| ITEM | 8500MC/MM | 8550MC/MM |
| Flow range | 10SCCM〜20SLM | 30SLM〜100SLM |
| （N2 equivalent 20℃/1ATM） | （freely selectable） | （freely selectable） |
| Sensor type | Thermal sensor | |
| Valve type（*1） | Normally closed proportional solenoid valve | |
| Control range（*1） | 2〜100％（F.S.） | 5〜100％（F.S.） |
| Response（*1） | ≤2sec | ≤3sec |
| (within±2%F.S) | (within±2%F.S.) | |
| Accuracy | ±1.0%F.S.（25℃） | ±1.5%F.S.（25℃） |
| Temperature coefficient | ±0.1F.S./℃（15〜35℃） | ±0.2F.S./℃（15〜35℃） |
| Repeatability | ±0.5%F.S. | |
| Operating differential pressure （*1） |
F.S.≤5SLM 50〜300kPa（G） | F.S.≤50SLM 150〜300kPa（G） |
| F.S.＞5SLM 100〜300kPa（G） | F.S.＞50SLM 200〜300kPa（G） | |
| Option：Medium differential pressure (MP), low differential pressure (LP) specifications are available | ||
| Allowable operating pressure（*1） | 500kPa（G） or less | |
| Proof pressure | 980kPa（G） | |
| Leak rate | ≤1×10−8Pa・㎥/s（excluding permeation of He） | |
| Allowable operating temperature | 5〜45℃ | |
| Allowable operating humidity | 10〜90％RH（No condensation allowed） | |
| Materials of the gas contact part | Body: SUS316 | |
| Valve seat : FKM（option: CR or NBR） | ||
| Sealing : FKM（option: CR or NBR） | ||
| Electrical connection | Dsub half-pitch 20pin DX10M−20S(HRS) | |
| Flow rate setting signal | 0〜5VDC（input impedance 100kΩ or more) | |
| （*1） | or 4〜20mA selectable | |
| Flow rate output signal | 0〜5VDC（external load resistance 250kΩ or more） or | |
| 4〜20mA （external load resistance 300Ω or less）selectable | ||
| Communication | RS232C（3 wire）or RS485（3 wire） selectable | |
| Other functions | Instantaneous flow rate・integrated flow rate display （ 7-segment 4-digit LED | |
| display accuracy ±1% integrated display 0000〜9999MAX）, | ||
| Alarm output（NPN open collector output 2 points | ||
| Max DC35V 50mA）, pattern setting（5 pattern） function | ||
| Required power supply | 24VDC±10%（ripple 5%） current consumption 300mA max | |
| Joint | Standard 1/4F900（9/16-18UNF） | Standard 3/8F900（9/16−18UNF） |
| （Main unit bore） | Option 1/8F900, 1/4UJR, | Option 1/2F900, 3/8UJR, |
| Rc1/4 etc. | Rc3/8 etc. | |
| Weight | Approx. 1200g | Approx. 1500g |
(*1)Only for the mass flow controller.
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