Kofloc 8500 Series Mass Flow Meter

This mass flow controller/meter driven by 24VDC power supply has been developed as a successor of the MODEL
8300. The viewpoint change function of the display unit and the pattern setting function are unique to this model, and noise resistance has been improved dramatically. A sister model with a detachable display and setting unit is also available.

  • The high-lift actuator allows this compact model to control a large flow rate.
  • Equipped with a display and setting unit, this model can be operated by the 24VDC power supply.
  • The RS232C/RS485 communication function and integration function are provided as standard equipment.
  • The 14-bit converter permits to display and operation in 4-1/2 digits.
  • Control of the flow rate of inflammable gas is possible because the heat generating part of the sensor is not exposed to the gas.
  • There are no limitations to the mounting position that may be employed.
  • In addition to the SV setting, five other patterns can be set.
  • Auto zero and auto close functions are also standard.

Specification

ITEM 8500MC/MM 8550MC/MM
Flow range 10SCCM〜20SLM 30SLM〜100SLM
(N2 equivalent 20℃/1ATM) (freely selectable) (freely selectable)
Sensor type Thermal sensor
Valve type(*1) Normally closed proportional solenoid valve
Control range(*1) 2〜100%(F.S.) 5〜100%(F.S.)
Response(*1) ≤2sec ≤3sec
(within±2%F.S) (within±2%F.S.)
Accuracy ±1.0%F.S.(25℃) ±1.5%F.S.(25℃)
Temperature coefficient ±0.1F.S./℃(15〜35℃) ±0.2F.S./℃(15〜35℃)
Repeatability ±0.5%F.S.
Operating differential
pressure
(*1)
F.S.≤5SLM 50〜300kPa(G) F.S.≤50SLM 150〜300kPa(G)
F.S.>5SLM 100〜300kPa(G) F.S.>50SLM 200〜300kPa(G)
Option:Medium differential pressure (MP), low differential pressure (LP) specifications are available
Allowable operating pressure(*1) 500kPa(G) or less
Proof pressure 980kPa(G)
Leak rate ≤1×10−8Pa・㎥/s(excluding permeation of He)
Allowable operating temperature 5〜45℃
Allowable operating humidity 10〜90%RH(No condensation allowed)
Materials of the gas contact part Body: SUS316
Valve seat : FKM(option: CR or NBR)
Sealing : FKM(option: CR or NBR)
Electrical connection Dsub half-pitch 20pin DX10M−20S(HRS)
Flow rate setting signal 0〜5VDC(input impedance 100kΩ or more)
(*1) or 4〜20mA selectable
Flow rate output signal 0〜5VDC(external load resistance 250kΩ or more) or
4〜20mA (external load resistance 300Ω or less)selectable
Communication RS232C(3 wire)or RS485(3 wire) selectable
Other functions Instantaneous flow rate・integrated flow rate display ( 7-segment 4-digit LED
display accuracy ±1% integrated display 0000〜9999MAX),
Alarm output(NPN open collector output 2 points
Max DC35V 50mA), pattern setting(5 pattern) function
Required power supply 24VDC±10%(ripple 5%) current consumption 300mA max
Joint Standard 1/4F900(9/16-18UNF) Standard 3/8F900(9/16−18UNF)
(Main unit bore) Option 1/8F900, 1/4UJR, Option 1/2F900, 3/8UJR,
Rc1/4 etc. Rc3/8 etc.
Weight Approx. 1200g Approx. 1500g

(*1)Only for the mass flow controller.

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