Kofloc Low-Cost Metal Sealed Mass Flow Controller /Meter
Model 5400
The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to the conventional MFC. The sensor drive system is improved : the zero-drift is further reduced and the response in the lower range is improved . The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 series.Features :
• Control and response in each setting range are improved.
• The following capability to the set voltage is improved (supporting ramping specifications).
• As the valve is improved, the control resolution in each range is improved.
• The following capability to the set voltage is improved (supporting ramping specifications).
• As the valve is improved, the control resolution in each range is improved.
Standard Spesifications :
1. Flow range (N2 equivalent,20℃/1 atm)
5400 : 10 SCCM–20 SLM (freely selectable)
5410 : 10 SCCM–20SLM(freely selectable)
2. Sensor
5400 : Thermal mass flow sensor
3. Valve type
5400 : Proportional solenoid valve (closed when not energized) 5410 : –
4. Control range
5400 : 2–100% (F.S.) 5410 : –
5. Response
5400 : 1 sec. or less (0–100% within ±2% typical) 5410 : –
6. Accuracy
5400 : ±1% F.S. (20℃)
7. Repeatability : Within ±0.2% F.S. (20℃)
8. Operating differential pressure
5400 : F.S. ≤ 5 SLM: 50–300 kPa 5410 : –
F.S.> 5 SLM: 100–300 kPa –
9. Allowable operating pressure
5400 : 300 kPa (G) or less
10. Proof pressure : 980 kPa (G)
11. Leak rate : 1 × 10-11 Pa•m3/s or less
12. Allowable ambient temperature : 0–50℃ (Accuracy guaranteed at 15–35℃, ±0.1% F.S./℃)
13. Allowable ambient humidity : 10–90% (No condensation allowed)
14. Materials of parts in contact with gases :
– Body: SUS316L
– Diaphragm: Ni-Co
– Valve seat: PTFE
– Sealing: SUS316L, Ni
15. Electric connection :
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
16. Flow rate input signals :
5400 : 0–5 VDC (Input impedance: 1 MΩ or more) 5410 : –
17. Flow rate output signals : 0–5 VDC (Minimum load resistance: 250 kΩ or more)
18. Required power supply :
5400 : +15 VDC (±5%) 100 mA, 5410 : +15 VDC (±5%) 100 mA,
−15VDC (±5%) 200mA −15VDC (±5%) 100mA
19. Joint (Main unit bore) : Standard: 1/4 VCR equivalent Option: 1/4 SWL
20. Weight
5400 : Approx. 1000 g 5410 : Approx. 800 g