Kofloc Low-Cost Metal Sealed Mass Flow Controller /Meter Model 5400

Kofloc Low-Cost Metal Sealed Mass Flow Controller /Meter
Model 5400

The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to the conventional MFC. The sensor drive system is improved : the zero-drift is further  reduced and the response in the lower range is improved . The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 series.
Features :
• Control and response in each setting range are improved.
• The following capability to the set voltage is improved (supporting ramping specifications).
• As the valve is improved, the control resolution in each range is improved.
Standard Spesifications :
1. Flow range (N2 equivalent,20/1 atm) 
5400  : 10 SCCM–20 SLM (freely selectable)
5410 :  10 SCCM–20SLM(freely selectable)
2. Sensor
5400  : Thermal mass flow sensor
3. Valve type 
5400  : Proportional solenoid valve (closed when not energized)    5410 :  –
4. Control range 
5400  : 2–100% (F.S.)                                                              5410 :  –
5. Response 
5400  : 1 sec. or less (0–100% within ±2% typical)                              5410 :  –
6. Accuracy 
5400  : ±1% F.S. (20)
7. Repeatability : Within ±0.2% F.S. (20)
8. Operating differential  pressure 
5400  : F.S. ≤ 5 SLM: 50–300 kPa                                              5410 :  –
         F.S.> 5 SLM: 100–300 kPa                                             –
9. Allowable operating pressure
5400  : 300 kPa (G) or less
10. Proof pressure : 980 kPa (G)
11. Leak rate : 1 × 10-11 Pa•m3/s or less
12. Allowable ambient temperature  :  0–50 (Accuracy guaranteed at 15–35,  ±0.1% F.S./)
13. Allowable ambient humidity :   10–90% (No condensation allowed)
14. Materials of parts in  contact with gases :  
 Body: SUS316L
– Diaphragm: Ni-Co
– Valve seat: PTFE
– Sealing: SUS316L, Ni
15. Electric connection :
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
16. Flow rate input signals   :
5400  :  0–5 VDC (Input impedance: 1 MΩ or more)  5410 :  –
17. Flow rate output signals :  0–5 VDC (Minimum load resistance: 250 kΩ or more)
18. Required power supply :
5400  :  +15 VDC (±5%) 100 mA,                     5410 :  +15 VDC (±5%) 100 mA,
              −15VDC (±5%) 200mA                                    −15VDC (±5%) 100mA
19. Joint (Main unit bore) : Standard: 1/4 VCR equivalent Option: 1/4 SWL
20. Weight 
5400  :   Approx. 1000 g                                         5410 :  Approx. 800 g